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Plasma Etching by M. Sugawara, Hardcover | Indigo Chapters
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Plasma Etching by M. Sugawara, Hardcover | Indigo Chapters
From M. Sugawara
Current price: $435.00
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Size: 23 x 234 x 750
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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored. | Plasma Etching by M. Sugawara, Hardcover | Indigo Chapters
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