This comprehensive book employs molecular dynamics simulation methods to systematically discuss nanoscale friction and wear issues in the fields of micro-equipment and micro-manufacturing. It utilizes the LAMMPS large-scale parallel software for simulation calculations, and discusses dislocation theory, phase transformation theory, and phase field methods. The highly targeted content addresses nanoscale friction and wear issues in the micro-equipment and micro-manufacturing sectors. Particularly, the volume includes many practical details regarding LAMMPS simulation modeling methods, parameter settings, and simulation techniques.The useful reference text benefits professionals, academics, researchers and graduate students in tribology, mechanical engineering, computational nanoscience and MEMS/NEMS.